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순번 장비명 제조업체 모델명 담당자(전화)
1 E-Beam Lithography System 1 ELIONIX Inc. ELS-7000 한창희
(042-366-1533)
2 E-Beam Lithography System 2 JEOL Ltd. JBX-9300FS 김기남
(042-366-1535)
3 Nano Imprint System Molecular Inprints Inc. Imprio-100™ 한창희
(042-366-1533)
4 KrF Scanner Nikon Inc. S203-B 김광희
(042-366-1536)
5 Track System 1 DNS KOREA CO., LTD K-Spin8 김광희
(042-366-1536)
6 CD-SEM 1 Hitachi High-Technologies Corporation S-9260A 이동욱
(042-366-1532)
7 Overlay Measurement System KLA-Tencor Corporation ARCHER-10XT 이동욱
(042-366-1532)
8 Particle Counter KLA-Tencor Corporation Surfscan SP-1 Classic 한창희
(042-366-1533)
9 Oven NYMTECH Co., Ltd. NYM-FUR-200 김기남
(042-366-1535)
10 Optical Microscope Carl Zeiss Co., Ltd. Axioskop2 MAT 한창희
(042-366-1533)
11 Track KDNS(OFT) MS-211 한창희
(042-366-1533)
12 DUV Step-and-Scan System(ASML KrF Scanner) ASML PAS5500/700D 이동욱
(042-366-1532)
13 Advanced CD-Measurement SEM Hitachi High Technologies Corporation S-8820 이동욱
(042-366-1532)
14 Track System 2 TEL(Tokyo Electron Limited) MK-8 한창희
(042-366-1533)
15 I-Line Step and Repeat System (I-Line Stepper) Nikon NSR-2205i11D 김광희
(042-366-1536)
16 Track System 3 TEL(Tokyo Electron Limited) ACT-8 이동욱
(042-366-1532)
17 Poly Etcher Lam Research TCP-9400DFM 유동은
(042-366-1531)
18 Deep Si Etcher Alcatel AMS 200 노길선
(042-366-1537)
19 Dielectric Etcher 1 Lam Research EXELAN-HPT 유동은
(042-366-1531)
20 Metal Etcher 1 Lam Research TCP-9600DFM 서창호
(042-366-1534)
21 Tungsten Etcher Lam Research TCP-9600PTX 서창호
(042-366-1534)
22 PR Stripper 1 PSK DAS-2000 유동은
(042-366-1531)
23 Dielectric Etcher 2 AMAT P-5000 노길선
(042-366-1537)
24 Metal Etcher 2 AMAT P-5000 노길선
(042-366-1537)
25 Oxide Dry Etcher TEL(Tokyo Electron Limited) SCCM 유동은
(042-366-1531)
26 High Current Implantation Varian VIISTA80HP 홍대원
(042-366-1561)
27 High Energy Implantation Excelis GSD/HE 홍대원
(042-366-1561)
28 CMP 1 DOOSAN DND UNIPLA™ 231 이기성
(042-366-1568)
29 Furnace 1 (LP-CVD) Centrotherm E1200 황해철
(042-366-1564)
30 Furnace 2 (Oxidation & Anneal) Centrotherm E1200 황해철
(042-366-1564)
31 ALD IPS Nano-ALD2000 심갑섭
(042-366-1563)
32 RTP NYMTECH RTA200H-SP1 홍대원
(042-366-1561)
33 Metal RTP Metron AG Heatpulse 8800 홍대원
(042-366-1561)
34 Cu CMP / Cu Barrier Metal CMP Doosan Mecha Tech UNIPLA 231 이기성
(042-366-1568)
35 Wet Clean HIT NXWET 이기성
(042-366-1568)
36 Wet Bench GSI GMW-05 이기성
(042-366-1568)
37 Sputter AMAT ENDURA-5500 심갑섭
(042-366-1563)
38 HDP/PECVD Novellus SPEED/Concept Two SEQUEL 박상현
(042-366-1566)
39 HDP/CNT Jusung TRUFIL II/EUREKA-2000 박상현
(042-366-1566)
40 PE-TEOS AMAT P-5000 박상현
(042-366-1566)
41 BPSG AMAT P-5000 박상현
(042-366-1566)
42 CVD W AMAT P-5000 Wxz 강민호
(042-366-1664)
43 Ion Shower Doping Samhan Vaccum SHIP-4T-220D 황해철
(042-366-1564)
44 E-Beam Evaporator Korea Vacuum KVET-C500200 심갑섭
(042-366-1563)
45 Multi Target Sputter SORONA SRN-110 강민호
(042-366-1664)
46 Electroplating Sambang ENG EP-2000 강희오
(042-366-1562)
47 CMP 2 Doosan DND UNIPLA211 이기성
(042-366-1568)
48 Critical Point Dryer Tousimis Automegasamdri-916B, Series C 김경민
(042-366-1666)
49 Wet Clean/Bench/Station HIT HWB-MCP8 이기성
(042-366-1568)
50 Dicing Machine DISCO Co. DAD3350 강희오
(042-366-1562)
51 Screen Printer DEK EUROPA 강희오
(042-366-1562)
52 Polymer Etcher Unaxis VL-ICP 서창호
(042-366-1534)
53 Reflow Speedline Technologies Bravo8105 강희오
(042-366-1562)
54 PR Stripper 2 PSK TS-200 서창호
(042-366-1534)
55 Nano Second Laser Exitech Ltd. MicrAblater M2000E/Y 강희오
(042-366-1562)
56 Metal Dry Etcher Oxford ICP380 서창호
(042-366-1534)
57 Contact (Mask) Aligner EV Group EVG6400 김기남
(042-366-1535)
58 Fusion Bonder/Hot Embossing EV Group EVG520HE 김기남
(042-366-1535)
59 Spray Coater EV Group EVG101 김기남
(042-366-1535)
60 Furnace 3 Centrotherm E1200 황해철
(042-366-1564)
61 Low Stress PECVD Unaxis SLR-730 박상현
(042-366-1566)
62 SPR Biacore AB Biacore3000 이문근
(042-366-1632)
63 Confocal Microscope Carl Zeiss LSM510-Meta NLO 이문근
(042-366-1632)
64 Microarray Scanner Axon Genepix4200A 이문근
(042-366-1632)
65 Microarrayer 1 GenomicSolutions OMNIGRID ACCENT 이문근
(042-366-1632)
66 Micro Forge Nikon MF-900 이문근
(042-366-1632)
67 Micro Pipette Puller Sutter Instrument Co. P-2000F 이문근
(042-366-1632)
68 Polymer CVD Specialty Coating Systems PDS2010 배남호
(042-366-1634)
69 Microarrayer 2 Nima Technology Ltd. PIEZORRAY 이문근
(042-366-1632)
70 Plastic Micro Injection Mold Arburg GmbH + CO KG A270C400-100 이태재
(042-366-1633)
71 LB Through Nima Technology Ltd. 1232D1_Shuttle 안치원
(042-366-1731)
72 Chip Aligner Dr.Tresky AG T-3200 배남호
(042-366-1634)
73 Contact Angle Analyzer SEO Co., Ltd. Phoenix 300 Plus 이문근
(042-366-1632)
74 Nano Cluster & Generator Mantis Deposition Ltd. NanoSys500 안치원
(042-366-1731)
75 Chemical Vapor Condensation Digiwave Tech DTC-2000A 안치원
(042-366-1731)
76 High T/P Multiple Reactor Parr Instrument Co. Mo.5000 안치원
(042-366-1731)
77 Small Media Mill Union Process Inc. DMQ-05 안치원
(042-366-1731)
78 Particle Size Analyzer Malvern Zetasizer nano zs 안치원
(042-366-1731)
79 Glove Box M. Braun MB150-B-G-II 안치원
(042-366-1731)
80 Vacuum Oven Jeio Tech Co., Ltd. OV-12 안치원
(042-366-1731)
81 BET Surface Area Analyzer Micromeritics ASAP 2020 M+C 안치원
(042-366-1731)
82 Cs-Corrected Scanning Transmission Electron Microscopy JEOL JEM-ARM200F 박윤창
(042-366-1705)
83 FE-TEM 1 FEI Tecnai G² F30 S-TWIN 박윤창
(042-366-1705)
84 In-Situ TEM JEOL JEM-3011 HR 유정호
(042-366-1703)
85 FE-TEM 2 JEOL JEM-2100F HR 유정호
(042-366-1703)
86 Ion Milling System Gatan PIPS™ 유정호
(042-366-1703)
87 Precision Etching Coating System Gatan PECS™ 유정호
(042-366-1703)
88 FE-STEM Hitachi HD-2300A 박경진
(042-366-1709)
89 Dual Beam FIB system 1 FEI Helios NanoLab™ 박경진
(042-366-1709)
90 Single Beam FIB System Hitachi FB-2100 박경진
(042-366-1709)
91 Dual Beam FIB System 2 FEI Nova 200 박경진
(042-366-1709)
92 FE-SEM with EDS FEI Sirion 현문섭
(042-366-1706)
93 FE-SEM Hitachi S-4800 현문섭
(042-366-1706)
94 Pt Coater Baltec SCD005 현문섭
(042-366-1706)
95 Scanning Probe Microscope 1 Park Systems XE-100 현문섭
(042-366-1706)
96 Scanning Probe Microscope 2 Veeco Nanoman 현문섭
(042-366-1706)
97 FT-IR Microscope Bruker IFS66v/s & Hyperion3000 현문섭
(042-366-1706)
98 NIR Imaging Spectral dimensions MatrixNIR 현문섭
(042-366-1706)
99 Nano Indentation System MTS Nano Indenter XP 현문섭
(042-366-1706)
100 Auto Thickness Measurement System KLA-Tencor SFX100 손우식
(042-366-1708)
101 Spectroscopic Ellipsometer Woollam M2000D 손우식
(042-366-1708)
102 Spectroscopic Reflectometer K-MAC ST5000_Auto200 손우식
(042-366-1708)
103 Imaging Ellipsometer Nanofilm EP3_SE 손우식
(042-366-1708)
104 Surface Profiler Veeco Dektak-8 손우식
(042-366-1708)
105 Optical Surface Profiler Nano Focus m-Surf 손우식
(042-366-1708)
106 Stress Gauge FSM FSM500TC 손우식
(042-366-1708)
107 4-Point Probe A.I.T. CMT SR2000 손우식
(042-366-1708)
108 Wafer Prober & Summit Agilent & Cascade 4156C, 4284A & 1274B 고진원
(042-366-1704)
109 Semicondutor Characterization System & Summit Keithley & Cascade 4200 SCS/F & 11862B 고진원
(042-366-1704)
110 Process Control Monitoring System Agilent + Accretech 4072A + UF3000 고진원
(042-366-1704)
111 Reactive Ion Etcher SAMCO RIE 10NR 고진원
(042-366-1704)
112 X-RAY X-TEK SYSTEMS LTD. REVOLUTION 고진원
(042-366-1704)
113 Auto Stage Optical Microscope Olympus MX51L + Dotslide 고진원
(042-366-1704)
114 Magnetic Sector SIMS CAMECA IMS 7f 정칠성
(042-366-1702)
115 Cadence Cadence Design System Virtuoso 김병일
(042-366-1631)
116 TCAD Simulator synopsys sentaurus 임부택
(042-366-1607)
117 IC-CAP Agilent IC-CAP 2006 설우석
(042-366-1605)
118 ADS(Advanced Design System)or RFDE Agilent ADS 2005A 설우석
(042-366-1605)
119 Coventor Ware Coventor. Inc Conventor Ware 2010 김태현
(042-366-1736)