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순번 장비명 제조업체 모델명 담당자(전화)
1 E-Beam Lithography System 1 (9300) JEOL JBX9300FS 김창환
(031-546-6336)
2 E-Beam Lithography System 2 (6000) JEOL JBX6000FS/E 김창환
(031-546-6336)
3 Nanoimprinter OBDUCAT EITRE-8 허은진
(031-546-6340)
4 KrF Stepper ASML PAS5500/300C 황선용
(031-546-6338)
5 Auto Aligner(2~3inch) Karl suss MA150e 허은진
(031-546-6340)
6 Auto Aligner(4~6inch) Karl suss MA150e 강세민
(031-546-6313)
7 Mask Aligner 1&2(R&D) EVG EVG620 김서현
(031-546-6236)
8 Track 1(2~3inch) SVS MSX1000 김서연
(031-546-6237)
9 Track 2(4~6inch) SVS MSX2000 황선용
(031-546-6338)
10 Track 3(4~6inch) SVS MSX1000 김서현
(031-546-6236)
11 Track 4(4~6inch) SVS MSX1000 허은진
(031-546-6340)
12 Hot Plate Baker 1&2&3 JOEUN Tech. JHS1W6-250M 김창환
(031-546-6336)
13 Spin Coater SUSS Microtec DELTA80T 허은진
(031-546-6340)
14 Convection Oven 1&2 JEIO TECH CO-125D-NS 허은진
(031-546-6340)
15 Mask Cleaner Yooil Tech. YIT-PMC-M4K 허은진
(031-546-6340)
16 CD-SEM 1 Hitachi S-9260A 장민철
(031-546-6224)
17 Organic Wet-Station(Litho) ATIS Designed for KANC 이동근
(031-546-6322)
18 Develop Wet-Bench(Litho) ATIS Designed for KANC 이동근
(031-546-6322)
19 Organic Wet-Bench(Litho) ATIS Designed for KANC 이동근
(031-546-6322)
20 SRD 1&2(Litho) VANTAGE VTI470S 이동근
(031-546-6322)
21 Acid Wet-Station ATIS Designed for KANC 이동근
(031-546-6322)
22 Alkali Wet-Station ATIS Designed for KANC 이동근
(031-546-6322)
23 Organic Wet-Station ATIS Organic Wet Station 이동근
(031-546-6322)
24 SRD 1&2&3 VANTAGE VTI470S 이동근
(031-546-6322)
25 Liftoff Machine M.SETEK VL-6020 강세민
(031-546-6313)
26 Spin Etcher M.SETEK VE-8200 강세민
(031-546-6313)
27 Au Plating Machine (Frontside) Sungwon Forming SWP-C3D 이동근
(031-546-6322)
28 Au Plating Machine (Backside) Sungwon Forming SWP-C3D 이동근
(031-546-6322)
29 Acid Wet-Station(R&D) ATIS Designed for KANC 이동근
(031-546-6322)
30 Alkali Wet-Station(R&D) ATIS Designed for KANC 이동근
(031-546-6322)
31 Organic Wet-Station(R&D) ATIS Designed for KANC 이동근
(031-546-6322)
32 Acid Wet-Bench ATIS Designed for KANC 이동근
(031-546-6322)
33 Alkali Wet-Bench ATIS Designed for KANC 이동근
(031-546-6322)
34 Organic Wet-Bench ATIS Designed for KANC 이동근
(031-546-6322)
35 LiftOff Wet-Bench(R&D) ATIS Designed for KANC 강세민
(031-546-6313)
36 SRD 1&2&3 VANTAGE VTI470S 이동근
(031-546-6322)
37 Laser Marker EO Techniccs SFL063 김창환
(031-546-6336)
38 Cu/Ni Plating Machine Sungwon FOrming SW-PM2-R2Q1 이동근
(031-546-6322)
39 E-Beam Evaporator 1 (R&D) ULTECH UEE 이병오
(031-546-6337)
40 E-Beam Evaporator 2 (R&D) ULTECH UEE 이병오
(031-546-6337)
41 E-Beam Evaporator 3 (R&D) ULTECH UEE 이병오
(031-546-6337)
42 PE(HDP)-CVD(R&D) BMR High-DEP 박미림
(031-546-6238)
43 Sputter(R&D) ULTECH SPS series 임웅선
(031-546-6235)
44 ICP Etcher 1 (R&D) STS Multiplex ICP 최재원
(031-546-6220)
45 ICP Etcher 2 (R&D) STS Multiplex ICP 윤홍민
(031-546-6335)
46 ICP Etcher 3 (R&D) STS Multiplex ICP 최재원
(031-546-6220)
47 ICP Etcher 4 (R&D) OXFORD SYSTEM ICP 380 윤홍민
(031-546-6335)
48 Si Deep Etcher(R&D) ALCATEL AMS200 윤홍민
(031-546-6335)
49 ICP PR Asher(R&D) AMS ALA-0601E 김창환
(031-546-6336)
50 RTA(R&D) NYM TECH RTA150H-SVP1 임웅선
(031-546-6235)
51 MOCVD 1 AIXTRON AIX200/4 RF 김창주
(031-546-6333)
52 MOCVD 2 AIXTRON AIX2400G3HT 송근만
(031-546-6328)
53 MOCVD 3 AIXTRON Aix2600 G3 IC 김창주
(031-546-6333)
54 MOCVD 4 AIXTRON CRIUS-R 전동환
(031-546-6330)
55 MBE SVTA SVTA35-10-4-V 김종민
(031-546-6325)
56 XRD BRUKER D8 DISCOVER 송근만
(031-546-6328)
57 PL Mapper ACCENT RPM2000 문아영
(031-546-6230)
58 ECV Accent ECVPro 정해용
(031-546-6331)
59 Hall Measurement System Accent HL5500PC 오세웅
(031-546-6231)
60 Non-Contact Sheet Resistance LEI 1510B 김동현
(031-546-6329)
61 Wafer Bonder AST Tbon-100 임웅선
(031-546-6235)
62 E-Beam Evaporator 1 ULVAC El-5 이근우
(031-546-6215)
63 E-Beam Evaporator 2 ULVAC El-5 이근우
(031-546-6215)
64 PECVD 1 Unaxis VL-LA-PECVD 이용수
(031-546-6318)
65 PECVD 2 Unaxis VL-LA-PECVD 이용수
(031-546-6318)
66 Sputter(Cluster) ULVAC SME-200J 임웅선
(031-546-6235)
67 Batch Type Sputter ULVAC ULDiS-4540SV 임웅선
(031-546-6235)
68 LPCVD CENTROTHERM E1550 이용수
(031-546-6318)
69 ICP Etcher 1 Unaxis VL-ICP-GaAs Via-III 윤홍민
(031-546-6335)
70 ICP Etcher 2 Unaxis VL-ICP 최재원
(031-546-6220)
71 ICP Etcher 3 Unaxis VL-ICP 최재원
(031-546-6220)
72 RIE 1 Unaxis VL-PHF-RIE 윤홍민
(031-546-6335)
73 ICP PR Asher 1&2 BMR DFS200 김창환
(031-546-6336)
74 Microwave Asher ULVAC Enviro II 강세민
(031-546-6313)
75 RIE 2 PTI VL-PHF-RIE 윤홍민
(031-546-6335)
76 RTA NYM TECH RTA150H-AVP1 임웅선
(031-546-6235)
77 Track V(8inch) TEL Mark-7 장민철
(031-546-6224)
78 CD-SEM 2 Hitachi S8820 장민철
(031-546-6224)
79 I-line Stepper Nikon i9C 강세민
(031-546-6313)
80 Wet Station Sugai Wet Station 200 이동근
(031-546-6322)
81 Sputter APPLIED MATERIALS E5500 임웅선
(031-546-6235)
82 FURNACE TEL alpha-805D 이용수
(031-546-6318)
83 Ion Implanter VERIAN EHPi-220 이용수
(031-546-6318)
84 ICP PR Asher 3 PSK DAS-2000 윤홍민
(031-546-6335)
85 ICP Etcher 4 TEL Unity-ale 855 SS 윤홍민
(031-546-6335)
86 ICP Etcher 5 LAM TCP9408 윤홍민
(031-546-6335)
87 Dc Prober Electroglas EG4080X 이병오
(031-546-6337)
88 Die Bonder Datacon 2200EVO 이희관
(031-546-6226)
89 Wire Bonder K&S Maxum Ultra 이희관
(031-546-6226)
90 Laser Scriber Hyer Photon Systems HPS-363KT 이희관
(031-546-6226)
91 Dispenser MUSASHI Shot Mini 200S-3A 이희관
(031-546-6226)
92 Automatic Dicing Saw DISCO DAD3350 박범두
(031-546-6242)
93 Prober OPTO SYSTEM WPS3100 최영수
(031-546-6327)
94 Sorter OPTO SYSTEM WDS2200 최영수
(031-546-6327)
95 OPTO SYSTEM Prober&Sorter WMSS2000 최영수
(031-546-6327)
96 Thermal Shock ESPEC TSE-11A 박문희
(031-546-6219)
97 HAST Chamber ETAC PM-420 박문희
(031-546-6219)
98 Analytic STEM JEOL/CEOS JEM-2100F, Cs corrector 김가희
(031-546-6225)
99 HR-TEM 2 JEOL JEM-2100F 김가희
(031-546-6225)
100 FIB 1 FEI NOVA 600 Nanolab 박덕수
(031-546-6321)
101 FIB 2 FEI Quanta 3D FEG 박문희
(031-546-6219)
102 FESEM 1, 3 Hitachi S-4800 강성민
(031-546-6051)
103 FESEM 2 Hitachi S-4300SE 강성민
(031-546-6051)
104 CL GATAN MONO CL3+ 강대훈
(031-546-6227)
105 AFM 1, 2, 3 PSIA XE100, XE150 강대훈
(031-546-6227)
106 FT-IR Thermo electron corp. Nicolet5700 김보슬
(031-546-6229)
107 Spectrophotometer Varian Cary 5000 김보슬
(031-546-6229)
108 TCSPC Picoquant FluoTime200 강성민
(031-546-6051)
109 UV/VIS/NIR/THz Spectroscopic Source Coherent Chameleon-XR 강성민
(031-546-6051)
110 Scanning PL Asylum Research MFP-3D Bio 강성민
(031-546-6051)
111 LIV System Optel-Precision OPI-150 최영수
(031-546-6327)
112 Probe Station 1 Cascade Microtech Summit11741B 박덕수
(031-546-6321)
113 Probe Station 2 Cascade Microtech Summit12201B 박덕수
(031-546-6321)
114 Probe Station 3 Cascade Microtech Summit11971B 박덕수
(031-546-6321)
115 67GHz Modeling Sys. Agilent 85225GE09 박덕수
(031-546-6321)
116 110GHz Modeling Sys. Agilent 85225HE01 박덕수
(031-546-6321)
117 Parameter Analyzer 1, 2 Keithley, Agilent 4200-SCS/F, 4156C 박덕수
(031-546-6321)
118 ADS Agilent ADS 박덕수
(031-546-6321)
119 ICCAP Agilent IC-CAP 박덕수
(031-546-6321)
120 Stress Meas. System Frontier Semiconductor FSM 500TC 이용수
(031-546-6318)
121 Ellipsometer Ellipsotech ELLI-SE(UV)-FM6-R 김창환
(031-546-6336)
122 Surface Scan/Profiler KLA-Tencor P15 윤홍민
(031-546-6335)
123 Microscope Olympus MX61 허은진
(031-546-6340)
124 Solar Simulator Wacom WXS-220S-L2,AM1.5GM 최인혜
(031-546-6341)